Degradation of oxide-passivated boron-diffused silicon

نویسندگان

  • Andrew F. Thomson
  • Keith R. McIntosh
چکیده

Recombination in oxide-passivated boron-diffused silicon is found to increase severely at room temperature. The degradation reaction leads to a 45 fold increase in emitter recombination that saturates in 120 days, irrespective of whether the samples received a forming-gas anneal. The degradation was also examined for diffusions stored at 50, 75, and 100 °C. The results indicate that the degradation follows a second-order reaction where the time constant of one component of the reaction is 10–40 times shorter than the other, and where the activation energy of the fast reaction is 0.19 0.05 eV. Subsequent to degradation, annealing in air reduces the recombination with increasing anneal temperature saturating at 300 °C to a value that is about four times higher than the predegradation value. A likely cause of this degradation is a reaction of atomic hydrogen at the silicon-oxide-silicon interface. © 2009 American Institute of Physics. DOI: 10.1063/1.3195656

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تاریخ انتشار 2009